Richard R. Mett, PhD

Richard Mett, PhD

Adjunct Associate Professor

(414) 955-4024

Research Interests

My interest in electromagnetic waves and the interaction of radio frequency (rf) radiation with matter go back to my high school days. As an undergraduate student, I pursued these interests and was awarded a Magnetic Fusion Energy Technology Fellowship by the US Department of Energy to study for two years in the graduate school of the University of California-Berkeley. I received my Masters of Science degree in 1985 and my PhD degree from the University of Wisconsin-Madison in 1990. Both degrees are in electrical engineering, specializing in the field of plasma physics.

My doctoral dissertation focused on driving direct electrical currents in plasmas using circularly polarized low frequency electromagnetic (Alfvén) waves. As a postdoctoral research fellow at the Institute for Fusion Studies in Austin, Texas, I researched the absorption of toroidicity-induced Alfvén waves in a tokamak plasma. This work contributed to the understanding of a burning fusion plasma. I continued this work at General Atomics in San Diego, California. In 1995, I became a scientist in the Dielectric Etch Division of Applied Materials in Santa Clara, California, where I solved many problems related to high DC and rf voltages and low pressure gases, efficient application of relatively high rf power to plasmas, electrostatic chucking of wafers, and plasma uniformity. My work there resulted in 10 US patents.

In late 1998, I accepted a teaching position in the physics department at the Milwaukee School of Engineering (MSOE), where I currently teaches courses in electric and magnetic fields and modern physics. In 2000, I joined MCW part-time as a scientist specializing in microwaves and EPR.

Since 2001, I have spent about half of my time teaching at MSOE and half of my time doing EPR research at MCW. My research at MCW has resulted in various publications, the subjects of which include the discovery of how to make a microwave cavity with an additional axis of spatial uniformity, and the discovery of a way of increasing the EPR signal strength by almost an order of magnitude through sample partitioning and unconventional orientation and placement. In my work at MCW, I collaborate with Dr. Hyde and make use of finite-element electromagnetic computer modeling.

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  Selected Publications

Sidabras JW, Varanasi SK, METT RR, Swarts SG, Swartz HM, Hyde JS. A microwave resonator for limiting depth sensitivity for electron paramagnetic resonance spectroscopy of surfaces. Rev Sci Instrum. 2014 Oct;85(10):104707. doi: 10.1063/1.4898179. PMID:25362434  Free PMC Article

METT RR, Sidabras JW, Anderson JR, Hyde JS. Hyperbolic-cosine waveguide tapers and oversize rectangular waveguide for reduced broadband insertion loss in W-band electron paramagnetic resonance spectroscopy. Rev Sci Instrum. 2011 Jul;82(7):074704.

METT RR, Sidabras JW, Hyde JS. Coupling of Waveguide and Resonator by Inductive and Capacitive Irises for EPR Spectroscopy. Appl Magn Reson. 2009;35(2):285-318.

METT RR, Sidabras JW, Golovina IS, Hyde JS. Dielectric microwave resonators in TE(011) cavities for electron paramagnetic resonance spectroscopy. Rev Sci Instrum. 2008 Sep;79(9):094702.

METT RR, Sidabras JW, Hyde JS. Uniform radio frequency fields in loop gap resonators for EPR spectroscopy. Appl. Magn. Reson. 31:571-587 (2007).

Sidabras JW, METT RR,  Froncisz W, Camenisch TG, Anderson JR, Hyde JS. Multipurpose loop gap and cylindrical TE011 resonators for aqueous samples at 94 GHz. Rev. Sci. Instrum. 78:034701 (2007).

METT RR, Anderson JR, Sidabras JW, Hyde JS. EPR field modulation eddy current analysis of silver-plated graphite resonators. Rev. Sci. Instrum. 76:094702 (2005).

METT RR, Hyde JS. Microwave leakage from field modulation slots in TE011 EPR cavities. Rev. Sci. Instrum. 76:014702 (2005).

Sidabras JW, METT RR, Hyde JS. Aqueous flat cells perpendicular to the electric field for use in electron paramagnetic resonance spectroscopy. II: Design. J. Magn Reson. 172:333-341 (2005).

METT RR, Sidabras JW, Hyde JS. Radio frequency skin depth concepts in magnetic resonance. Curr. Top. Biophys. 28:117-122 (2004).

Anderson JR, METT RR, Hyde JS. Cavities with axially uniform fields for use in electron paramagnetic resonance. II: Free space generalization. Rev. Sci. Instrum. 73, 3027-3037 (2002).

Hyde JS, METT RR. Aqueous sample considerations in uniform field resonators for electron paramagnetic resonance spectroscopy. Curr. Top. Biophys. 26:7-14 (2002).

Hyde JS, METT RR, Anderson JR. Cavities with axially uniform fields for use in electron paramagnetic resonance. III: Re-entrant geometries. Rev. Sci. Instrum. 73:4003-4009 (2002).

METT RR, Froncisz W, Hyde JS. Axially uniform resonant cavity modes for potential use in electron paramagnetic resonance spectroscopy. Rev. Sci. Instrum. 72:4188-4200 (2001).

Lindley RA, Björkman CH, Shan H, Ke K-H, Doan K, METT RR, Welch M. Magnetic field optimization in a dielectric magnetically enhanced reactive ion etch reactor to produce an instantaneously uniform plasma. J. Vac. Sci. Technol. A 16:1600-1603 (1998).

METT RR, Strait EJ, Mahajan SM. Damping of toroidal Alfvén modes in DIII-D. Phys. Plasmas 1:3277-3287 (1994).

Berk HL, METT RR, Lindberg DM. Arbitrary mode number boundary layer theory for non-ideal toroidal Alfvén modes. Phys. Fluids B 5:3969-3996 (1993).

METT RR. Kinetic theory of RF current drive and helicity injection. Phys. Fluids B 4:225-231 (1992).

METT RR, Mahajan SM. Kinetic theory of toroidicity-induced Alfvén eigenmodes. Phys. Fluids B 4:2885-2893 (1992).

METT RR, Taylor JB. Steady-state dynamo and current drive in a nonuniform bounded plasma. Phys. Fluids B 4:73-78 (1992).

METT RR, Tataronis JA. Current drive via magnetohydrodynamic helicity waves in a nonuniform plasma. Phys. Fluids B 2:2334-2345 (1990).

METT RR, Lam SW, Scharer JE. Experimental investigation of a probe-induced localized electron temperature elevation near electron cyclotron resonance. IEEE Trans. Plasma Science 17:818-827 (1989).

METT RR, Tataronis, JA. Current drive via magnetohydrodynamic helicity waves. Phys. Rev. Lett. 63:1380-1383 (1989).

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METT RR, Noorbakhsh H, Greenway RD (Assignee Applied Materials, Inc.), Chamber Having Improved Gas Feed-Through and Method, U.S. Patent No. 6,500,299, issued December 31, 2002.

Dahimene M, METT RR, Salimian S (Assignee Applied Materials, Inc.) Method and Apparatus for Supplying a Chucking Voltage to an Electrostatic Chuck within a Semiconductor Wafer Processing System, U.S. Patent No. 6,198,616, issued March 6, 2001.

METT RR, Salimian S (Assignee Applied Materials, Inc.), Method and Apparatus for Minimizing Plasma Destabilization Within a Semiconductor Wafer Processing System, U.S. Patent No. 6,304,424, issued October 16, 2001.

Pu BY, Shan H, Björkman C, Doan K, Welch M, METT RR (Assignee Applied Materials, Inc.), Distributed Inductively-Coupled Plasma Source, U.S. Patent No. 6,273,022, issued August 14, 2001.

Shan H, Björkman CH, Luscher P, METT RR, Welch M (Assignee Applied Materials, Inc.), Apparatus and Method for Controlling Plasma Uniformity in a Semiconductor Wafer Processing System, U.S. Patent No. 6,232,236, issued May 15, 2001.

Taylor WN, METT RR, Curry MW (Assignee Applied Materials, Inc.), Safety Guard for an RF Connector, U.S. Patent No. 6,273,736, issued August 14, 2001.

Ke K-H, Lindley RA, Shan H, METT RR (Assignee Applied Materials, Inc.), Diagnostic Pedestal Assembly for a Semiconductor Wafer Processing System, U.S. Patent No. 5,989,349, issued November 23, 1999.

METT RR, Greenway RD, Bilek G, Joshi A (Assignee Applied Materials, Inc.), Impedance Matching Network, U.S. Patent No. 5,952,896, issued September 14, 1999.

METT RR, Salimian S, McNeal MG (Assignee Applied Materials, Inc.), DC Power Supply, U.S. Patent No. 6,005,376, issued December 21, 1999.

METT RR, Dahimene M, Salimian S, Luscher PE, Contreras MS (Assignee Applied Materials, Inc.), Apparatus and Method for Actively Controlling the DC Potential of a Cathode Pedestal, U.S. Patent No. 5,737,177, issued April 7, 1998.